Langmuir probe technique for plasma parameter measurement in a medium density discharge

The development of a microcomputer-controlled electrostatic probe as a diagnostic technique is described. The technique uses cylindrical probes and the definitive theory of Laframboise to give rapid measurements of the plasma parameters in a medium density (1010 to 1012 cm−3) plasma including the fast electron density and temperature. The iterative technique described overcomes many of the problems associated with established methods of Langmuir probe analysis.