测距
相控阵光学
相控阵
绝缘体上的硅
光学
材料科学
炸薯条
CMOS芯片
光电子学
硅
物理
计算机科学
电信
天线(收音机)
作者
Lanxuan Zhang,Yingzhi Li,Bo-Song Chen,Yubing Wang,Hongmei Li,Yu Hou,Min Tao,Yuxuan Li,Zihao Zhi,Xiaobin Liu,Xuetong Li,Quanxin Na,Qijie Xie,Mingshi Zhang,Xueyan Li,Fengli Gao,Xianshu Luo,Guo‐Qiang Lo,Junfeng Song
出处
期刊:Optics Express
[Optica Publishing Group]
日期:2022-01-27
卷期号:30 (4): 5008-5008
被引量:30
摘要
Silicon based optoelectronic integrated optical phased array is attractive owing to large-dense integration, large scanning range and CMOS compatibility. In this paper, we design and fabricate a SiN-on-SOI two-dimensional optical phased array chip. We demonstrate a two-dimensional scanning range of 96°×14.4° and 690 mW peak power of the main lobe. Additionally, we set up the time of flight (ToF) and frequency-modulated continuous-wave (FMCW) ranging systems by using this optical phased array chip, and achieve the objects detection at the range of 20 m in the ToF system and 109 m in the FMCW system, respectively.
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