材料科学
太赫兹辐射
薄脆饼
激光器
光学
光电子学
计量学
电阻式触摸屏
折射率
法布里-珀罗干涉仪
硅
二极管
半导体激光器理论
光子学
波长
物理
工程类
电气工程
作者
Martin R. Hofmann,Nils Surkamp,Alexandra Gerling,J. O’Gorman,Christiana B. Honsberg,Sebastian Schmidtmann,Uttam Nandi,Sascha Preu,Joachim Sacher,Carsten Brenner
摘要
We use a slotted Y-branch Laser for Terahertz thickness measurements of high resistive float zone silicon wafers of different thicknesses. The laser provides two-color emission in the 1550 nm region with an optical beat frequency of 1 THz. It is used as a photonic source for thickness measurements of high resistive silicon wafers with continuous wave Terahertz radiation. Frequency tuning is obtained through segment current tuning of the individual branches. We determine the sample´s refractive index and thickness by MSE fitting of the theoretical etalon transmission to the experimental results without additional knowledge.
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