Extended-wavelength 1.3-megapixel type-II superlattice SWIR compact camera system with scalable manufacturing

A shortwave infrared camera system with extended bandwidth of greater than 2 m and high resolution of 1.3 megapixels is demonstrated. The imager has a conventional p-i-n structure with type-II superlattice (T2SL) multi quantum well as the absorption region, and is backside illuminated to allow response to 400nm. The focal plane array is shown on both 8- and 12-µm pitches, with a wideband responsivity in a 0.4-2 µm range. New processing methodologies were developed and executed in a fabless model, achieving scalability, cost-efficiency, and high-performance metrics.