期刊:IEEE Electron Device Letters [Institute of Electrical and Electronics Engineers] 日期:2022-03-08卷期号:43 (5): 805-808被引量:9
标识
DOI:10.1109/led.2022.3157633
摘要
The humidity sensor based on quartz crystal microbalance (QCM) has a remarkable advantage for Internet of Things (IoT) applications owing to its digital output. Herein, one lead-free perovskite Cs 2 SnCl 6 film is employed to manufacture a QCM-based humidity sensor, and the practical application on IoT is successfully performed. The fabricated humidity sensor exhibits a logarithmic linearity response and an ultra-high response of 7289 Hz for the relative humidity ranging from 11% to 85%. Furthermore, the Langmuir adsorption model is adopted to reveal the adsorption kinetics of the water molecules on the Cs 2 SnCl 6 film. These results suggest that the proposed humidity sensor could be a promising candidate for remote and smart humidity sensors.