A 100-nG/√ Hz-Level Single Au Proof-Mass 3-Axis MEMS Accelerometer with Pillar-Shaped electrodes

This paper describes a single Au proof-mass 3-axis MEMS accelerometer with pillar-shaped electrodes. In order to investigate the relationship between the axial sensitivities and the Brownian noise (B _N ), we examine accelerometer analytical models in terms of sensitivity. Based on the analytical model, we design and fabricate a 3-axis Au proof-mass MEMS accelerometer with pillar-shaped electrodes. The measured sensitivities are consistent with the design values. The experimentally obtained B _N is found to be 130 nG/√ Hz. These results confirm that the 100 nG/√ Hz -level single proof-mass 3-axis MEMS accelerometer can be realized by using the pillar-shaped electrode.