Study of InP surface treatments by scanning photoluminescence microscopy

Spatially resolved photoluminescence (PL) measurements are used to study the effect of etching (HF, HNO3, NH4OH, H2O2) and annealing of InP surface. We reveal a strong nonuniformity of the PL intensity on a microscopic scale and a large dependence of the morphology of the PL images on chemical treatment and annealing of InP samples.