A 1.3-micrometre-thick elastic conductor for seamless on-skin and implantable sensors

聚二甲基硅氧烷 导电体 材料科学 电极 导线 复合材料 制作 可伸缩电子设备 光电子学 数码产品 纳米技术 电气工程 病理 物理化学 化学 工程类 替代医学 医学
作者
Zhi Jiang,Nuan Chen,Zhigao Yi,Junwen Zhong,Feilong Zhang,Shaobo Ji,Rui Liao,Yan Wang,Haicheng Li,Zhiyuan Liu,Yang Wang,Tomoyuki Yokota,Xiaogang Liu,Kenjiro Fukuda,Xiaodong Chen,Takao Someya
出处
期刊:Nature electronics [Nature Portfolio]
卷期号:5 (11): 784-793 被引量:214
标识
DOI:10.1038/s41928-022-00868-x
摘要

On-skin and implantable electronics require elastic conductors that are only a few micrometres thick and soft enough to form a seamless contact with three-dimensional structures. However, fabricating thin conductors that are mechanically durable and have consistent electrical properties with stretching is challenging. Here we report polydimethylsiloxane (PDMS)–gold conductors that are around 1.3 µm thick and have a controlled morphology of microcracks in the gold film. The microcracks are formed by evaporating a 50-nm-thick gold film onto a 1.2-µm-thick PDMS film that is supported during fabrication by a 100-µm-thick PDMS film on glass; thermal expansion of the thick PDMS film causes the evaporated gold to form a microcracked structure on the thin PDMS. The resulting conductors can be stretched by up to 300% and remain highly conductive after strain release. We use them to create on-skin electrodes that are breathable and water resistant, and can continuously record electrocardiogram signals. We also use the conductors to create on-skin sensors with less than 3 µm thickness that can detect small mechanical forces and create implantable nerve electrodes that can provide signal recording and stimulation. Polydimethylsiloxane–gold conductors that are 1.3 μm thick and have controlled morphology of microcracks in the gold film can be used to create breathable and water-resistant electrodes for recording electrocardiogram signals, as well as on-skin pressure sensors and implantable nerve electrodes.
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