Electromagnetic Modeling of a Probe for Scanning Microwave Microscopy

This work presents a model of an electromagnetic scanning microwave microscope cantilever used for a microwave probe. Real size high frequency model is designed and used in the frequency range 8 – 12 GHz. The aim is to look at the interaction of the scanning electromagnetic waves with different surface materials, such as metallic conductors and semiconductor materials. Results for electromagnetic field distributions are calculated for base scanning surfaces such as Si, GaAs and Au solid plates. Results obtained are useful for improving measurement accuracy of electromagnetic scanning microwave microscopy method in the case of electrically conductive surfaces.