阳极
压力测量
材料科学
氦
电压
光电子学
超高真空
电气工程
电极
原子物理学
机械工程
物理
纳米技术
工程类
量子力学
作者
Fei Yan,Dazhi Jin,Lei Chen,Xiang Wan,Kunxiang Xiao
标识
DOI:10.1109/deiv.2016.7763988
摘要
Measuring the pressure inside the compact sealed electronic vacuum devices is a difficult proposition that typically requires destructive analysis. In the paper, we offer an indirectly method to pressure measurement without operating the devices. Towards that end, a simple and compact Penning-type diacharge structure only include two electrodes and an additional permanent magnet is established. The discharge characteristics under different anode voltages and different pressures are studied. The principle in measuring the pressure inside compact sealed electronic vacuum devices is analyzed, and the pressure-current chart is acquired. A sustaining discharge strikes with a measurable pressure varying current starting at a pressure of 1-10 -2 Pa of helium. These results demonstrate the validity of this research and by applying our structure to compact sealed electronic vacuum devices, pressures inside the tubes can be measured without puncturing the vacuum envelope.
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