Study on surface roughness and resistivity of nano Ni-Al by magnetron sputtering

The relation between the resistivity and the surface roughness about Ni-Al films is studied.The Ni-Al films with the thickness about 15nm~140nm have been made by DC magnetron sputtering using Ni,Al target(99.99%) with high purity Ar.The resistivity and surface roughness of the Ni-Al film with different thickness were measured by beeline four-point probe and atomic force microscopy(AFM) at room temperature.The results show that the change of resistivity appeared to be approximately linear with surface roughness.