The Effect of Various Coil Parameters on Inductive Coupling Plasma Reactor Simulation Using COMSOL

The study of density distribution of inductively coupled plasma under different coil parameters can provide reference for the design of closed inductively coupled plasma with wave cavity. In this paper, the two-dimensional axisymetric model of ICP is firstly established. Then, the spatial distribution of pure argon plasma, electron temperature and electromagnetic field is calculated by using commercial software COMSOL, and the influence of the change of coil parameters on the spatial distribution of temperature and plasma density in the wave cavity is studied. Research results show that the appropriately radius of coil and coil spacing can significantly improve the uniformity of the plasma and not affect the electromagnetic wave transmission signals at the same time. Thus, we could improve uniformity of electron density and Cavity wave transmittance band by changing the parameters of the corresponding coil, so as to meet the needs of the plasma stealth.