Analysis of hydrogen diffusion from proton-exchanged layers in LiNbO3
作者
H. C. Casey,Chang-Ho Chen,J. M. Zavada,Steven W. Novak
出处
期刊:Applied Physics Letters [American Institute of Physics] 日期:1993-08-09卷期号:63 (6): 718-720被引量:22
标识
DOI:10.1063/1.109938
摘要
Hydrogen profiles for proton-exchanged layers in Z-cut LiNbO3 were obtained by secondary ion mass spectrometry measurements after annealing at 400 °C for times from 6 to 180 min. To fit the measured hydrogen profiles, it was necessary to use two separate Gaussian diffusion profiles which could be designated as a more slowly diffusing substitutional hydrogen on lithium sites and a more rapidly diffusing interstitial hydrogen. At 400 °C, analysis leads to a substitutional hydrogen diffusion coefficient Ds≊4.6×10−12 cm2/s and an interstitial hydrogen diffusion coefficient Di≊1.5×10−11 cm2/s.