Shack-Hartmann wavefront sensing with super-resolution photon-sieve array

Wavefront sensor has been widely used for various research fields. Among these wavefront measuring techniques, Shack-Hartmann wavefront sensor has the merit of simple structure, real-time detection and wide waveband. Traditional Shack-Hartmann wavefront sensor is usually based on geometrical optics, which builds a micro-lens array in front of a CMOS sensor. Here amplitude-only photon-sieve array was proposed to replace the micro-lens array to reduce the cost and simultaneously to improve the measurement accuracy by super-resolution focusing of test wavefront. A simulation experiment was carried out through software GLAD and another optical experiment was implemented by Liquid crystal spatial light modulators (LC-SLM) to verify the effectiveness. As a kind of amplitude-only diffractive lens, largeaperture photon-sieve array can be easily fabricated by lithography, which has great potential to be applied for measurement of large-scale laser beam and optical element.