Thin Tantalum Film Electrodeposition from an Ionic Liquid—Influence of Substrate Nature, Electrolyte Temperature and Electrochemical Parameters on Deposits’ Quality

This paper discusses the feasibility of tantalum electrodeposition carried out under potential control from 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)imide [BMPyr][TFSI] room temperature ionic liquid electrolyte containing tantalum pentafluoride (TaF5). The influence of electrode nature, electrolyte temperature and electrolysis duration on the morphology, the adherence, the thickness and the crystalline properties of tantalum deposits is reported. The obtained tantalum deposits are analyzed by SEM, XRD, Raman spectroscopy and XPS surface analytical techniques. Pulsed potential electrodeposition is investigated in order to enhance deposit properties. Post electrodeposition thermal treatments are also reported.