氮化硼
材料科学
铝
氮气
表面粗糙度
氮化物
大气压力
硼
钛
重组
Atom(片上系统)
曲面(拓扑)
分析化学(期刊)
复合材料
冶金
化学
地质学
色谱法
有机化学
图层(电子)
几何学
数学
基因
生物化学
海洋学
嵌入式系统
计算机科学
作者
Gaku Oinuma,Yasutaka Inanaga,Yasuhiro Tanimura,Masaki Kuzumoto,Yoichiro Tabata,Kensuke Watanabe
标识
DOI:10.1088/0022-3727/43/25/255202
摘要
The surface recombination of nitrogen atoms on various materials was investigated at atmospheric pressure. The afterglows of pure nitrogen discharge are injected into a surface loss test unit, whose path wall is composed of the materials to be examined. Measurement of the nitrogen atom densities at several points in the flowing afterglows reveals the temporal decay characteristics. The results are compared with two-dimensional numerical simulations to obtain the surface loss probability γ. Among the seven materials we studied (stainless steel, aluminium, titanium, alumina, Pyrex glass, aluminium nitride and boron nitride), stainless steel was found to have the highest γ value: 1.8 × 10 −3 ; the lowest was for boron nitride: 4.8 × 10 −5 . The dependence of γ on surface roughness and temperature was also examined.
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