A novel pressure array sensor based on contact resistance variation: Metrological properties

计量学 重复性 压力传感器 校准 磁滞 灵敏度(控制系统) 材料科学 度量(数据仓库) 尺寸计量学 压力测量 计算机科学 声学 光学 物理 电子工程 机械工程 数学 工程类 统计 量子力学 数据库
作者
Zaccaria Del Prete,Lucilla Monteleone,R. Steindler
出处
期刊:Review of Scientific Instruments [American Institute of Physics]
卷期号:72 (2): 1548-1553 被引量:52
标识
DOI:10.1063/1.1340561
摘要

The working principle and the metrological performances of a novel array sensor devoted to pressure map measurements are experimentally analyzed here. The physical principle on which the sensor elements are sensitive to the pressure is the variation of the contact resistance. Pressure maps from 1 up to 500 kPa can be measured. The prototype here utilized for the metrological characterization has been an 8×8 matrix sensor with a 5 mm spatial resolution over both x and y direction and a total thickness of 150 μm. The materials that have been chosen to assemble the prototype yielded to a very flexible and robust sensor which can easily be fitted over round surfaces without being damaged or leading to an alteration of its measuring properties. The static and the dynamic metrological performances of the sensor that have been studied and discussed are the response function and the calibration curve, the repeatability, the sensitivity, the time drift, the hysteresis, and the dynamic response. In spite of its functional and constructive simplicity, the metrological performances the sensor has exhibited, together with its peculiar constructive feature, have indicated the possibility to utilize it to effectively measure pressure maps in every application for which the sensor could be shaped in.
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