Preparation of SiC Composite with Isothermal Chemical Vapor Infiltration

In this paper, the influence of main infiltration parameters was studied, such as infiltration temperature, precursor gas flow ratio and rate. The optimized parameters for preparation of SiC composite with isothermal chemical vapor infiltration were given. The result shows that infiltration temperature is 1050℃, infiltration pressure is 6666.2Pa, and precursor gas flow ratio( Ar/MTS ) is 10. Although the infiltration time is 3 hours,the infiltration thickness is about 20μm,and the density has only a little increase. The infiltration effect is obvious.