Damage Effects of Heavy Ion Irradiation on MOST/C Multilayer Films

In this study, the nano-multilayer film was prepared by alternating deposition of MoS2/Ti composite layer and amorphous C layer, and the irradiation damage effect was studied by the heavy ion bombardment experiment of 2 MeV Au2+. The results show that the irradiation region of the film is about 500 nm deep. The MoS2 crystal inside the MoS2/Ti composite layer in the irradiation-affected area is destroyed by incident Au2+ ions and turns into a disordered state. With the increase of irradiation dose, the hardness of the film increases from 1.58 to 3.28 GPa, and the wear life of the film decreases sharply from 3 × 104 to 5 × 103 r due to the destruction of the internal crystal and the embrittlement of the structure. In addition, with the increase of irradiation dose, the interlayer interface is gradually blurred and the interlayer diffusion is gradually aggravated.