阳极氧化
材料科学
铝
氧化物
电解抛光
抛光
表面光洁度
图层(电子)
溶解
表面粗糙度
冶金
阻挡层
化学机械平面化
多孔性
复合材料
化学工程
电极
化学
电解质
物理化学
工程类
作者
Mana Iwai,Tatsuya Kikuchi
标识
DOI:10.1149/1945-7111/ace65a
摘要
A novel ultra-smoothing process for aluminum surfaces was developed using porous alumina formation and subsequent oxide dissolution. A submicron-scale periodic dimpled aluminum surface with an arithmetic mean roughness of 31.5 nm was prepared by anodizing in an etidronic acid solution. This dimpled aluminum specimen was then anodized in a sodium metaborate (NaBO 2 ) solution to form a unique porous alumina film with an extremely flat barrier layer, which differs from the typical hemispherical barrier layer. The outer porous layer became thicker with time during anodizing, whereas the thickness and smoothness of the inner barrier layer were maintained without oxide breakdown. As the porous alumina film was chemically removed in a CrO 3 /H 3 PO 4 solution, a smooth aluminum surface was exposed. The mean roughness of the aluminum surface drastically decreased to 0.5 nm by short-term anodizing for 15 min and slightly decreased with further anodizing. As a result, an ultra-smooth aluminum surface measuring 0.4 nm in roughness, which is much smaller than that of an electropolished aluminum surface (1.3 nm), was successfully obtained via anodizing in NaBO 2 and subsequent oxide dissolution. Our smoothing process was compared with conventional smoothing processes such as electropolishing and barrier oxide formation.
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