Bi-directional threshold voltage shift of amorphous InGaZnO thin film transistors under alternating bias stress

Abstract Amorphous InGaZnO (a-IGZO) has attracted a lot of attention as a high-mobility channel material for thin film transistors (TFTs). However, the instability mechanism involving threshold voltage and subthreshold swing in a-IGZO TFTs still requires further investigation. In this study, we investigated the electrical instability of amorphous InGaZnO thin film transistors subjected to alternating positive and negative bias stresses. Based on the respective mechanisms under positive and negative bias stresses, including ionization and spatial movement of oxygen vacancies, bi-directional threshold voltage shifts were observed under alternating bias stress. The subthreshold swing values vary with the bias stress polarity, reflecting the presence and distribution of oxygen vacancies. Our findings reveal a complementary mechanism based on oxygen vacancies, elucidating the behavior under complex bias stress schemes and extending our understanding of instability mechanisms beyond monotonous bias stress.