Quantitative phase imaging with a compact meta-microscope

Abstract Quantitative phase imaging (QPI) based on the transport-of-intensity equation (TIE) is a powerful technique in label-free microscopy. The image stack required for a successful TIE-QPI is traditionally obtained by translating the object or image plane, and the optical elements used in the conventional TIE-QPI systems are usually bulky and cumbersome. Stable and compact TIE-QPI methods capable of non-motion optical zooming can significantly facilitate applications that demand portability. Here, we propose a non-motion TIE-QPI method based on a dispersive metalens. The dispersive nature of the metalens is utilized to provide a spectral focal tuning. With fixed object and image planes, seven through-focus intensity images are captured by changing the illumination wavelength. The QPI performance is validated by retrieving the surface phase profiles of a microlens array and a phase resolution target, showing a high phase detection accuracy (deviation less than 0.03 wavelength). Subsequently, we established a compact meta-microscope by integrating the metalens with a commercially available CMOS image sensor, which shows good performance in microscopic imaging of unstained bio-samples. Our approach, based on the large-dispersive metalens, facilitates a compact and robust QPI system for optical metrology and label-free microscopy.