Miniaturized anti-interference cantilever-enhanced fiber-optic photoacoustic methane sensor

To realize all-optical passive detection of CH4 in narrow spaces and harsh environments, a compact cantilever-enhanced fiber-optic photoacoustic sensor (CEFPS) resistant to electromagnetic and ambient noise interference is proposed. Through theoretical analysis and finite element simulation, a miniaturized photoacoustic cell (PAC) with diffusion holes has been designed and fabricated. The diffusion holes are used for the circulation of the gas to be measured and attenuate the external noise coupled into the PAC. The concentration information of CH4 is obtained by demodulating the vibration amplitude of the built-in cantilever generated by the photoacoustic pressure. The design of the built-in cantilever structure avoids the possibility of mechanical damage and reduces the interference of external noise in the detection of photoacoustic signals. The experimental results and the Allan-Werle deviation analysis of the CH4 signal show that the minimum detection limit (MDL) is 0.32 ppm with an integration time of 60 s. The normalized noise equivalent absorption (NNEA) coefficient is calculated as 2.44 × 10−8 cm−1 W/Hz1/2. The developed CEFPS achieves performance comparable to conventional resonant photoacoustic spectroscopy CH4 detectors, although the volume is two orders of magnitude lower.