OPO robustness and measurability improvement via extended wavelengths

The semiconductor industry continually evaluates new materials to improve the process or minimize product variability, which could create measurement challenges for metrology tools in the visible and near-infrared (NIR) spectrum. Opaque materials (i.e., ‘hard masks,’ ‘HM’) are placed in between the resist (i.e., inner layer) and process (i.e., outer layer or underlying layer) in 3D NAND or DRAM processes to control the etch of high aspect-ratio structures to maximize product yield. However, longer wavelengths (e.g., IR WL) may be required to penetrate and properly view the underlying process layer and measure OVL accurately. In this work, longer wavelengths will be evaluated to improve measurement accuracy and keep up with the increasing use of opaque materials, which is expected to increase in future nodes. We will review the benefits of IR WL to OVL measurement accuracy by quantifying the OVL residuals, contrast precision (CP), and total measurement uncertainty (TMU) on multiple DRAM and 3D NAND critical layers.