单晶硅
机械加工
薄脆饼
脆性
硅
材料科学
钻石
金刚石车削
机械工程
振动
有限元法
金刚石研磨
工程物理
研磨
冶金
纳米技术
结构工程
工程类
声学
砂轮
物理
作者
Ansheng Li,Shunchang Hu,Yu Zhou,Hongyan Wang,Zhen Zhang,Wuyi Ming
出处
期刊:Micromachines
[Multidisciplinary Digital Publishing Institute]
日期:2023-07-27
卷期号:14 (8): 1512-1512
被引量:31
摘要
Due to the brittleness of silicon, the use of a diamond wire to cut silicon wafers is a critical stage in solar cell manufacturing. In order to improve the production yield of the cutting process, it is necessary to have a thorough understanding of the phenomena relating to the cutting parameters. This research reviews and summarizes the technology for the precision machining of monocrystalline silicon using diamond wire sawing (DWS). Firstly, mathematical models, molecular dynamics (MD), the finite element method (FEM), and other methods used for studying the principle of DWS are compared. Secondly, the equipment used for DWS is reviewed, the influences of the direction and magnitude of the cutting force on the material removal rate (MRR) are analyzed, and the improvement of silicon wafer surface quality through optimizing process parameters is summarized. Thirdly, the principles and processing performances of three assisted machining methods, namely ultrasonic vibration-assisted DWS (UV-DWS), electrical discharge vibration-assisted DWS (ED-DWS), and electrochemical-assisted DWS (EC-DWS), are reviewed separately. Finally, the prospects for the precision machining of monocrystalline silicon using DWS are provided, highlighting its significant potential for future development and improvement.
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