不对称
容性耦合等离子体
等离子体
物理
凝聚态物理
化学
原子物理学
量子电动力学
材料科学
量子力学
感应耦合等离子体
作者
Junzhu Yao,Liu Chenxi,Feng He,Jinsong Miao,Jiting Ouyang,Bocong Zheng
标识
DOI:10.1088/1361-6595/ad80c5
摘要
Abstract Introducing asymmetry in capacitively coupled plasmas (CCPs) is a common strategy for achieving independent control of ion mean energy and flux. Our 1d3v particle-in-cell/Monte Carlo collision (PIC/MCC) simulations reveal that a uniform magnetic field within a specific range can induce spatial asymmetry in low-pressure CCPs, even under perfectly symmetric conditions. This asymmetry, characterized by a shift in the plasma density distribution and significant differences in electron kinetics between the two sides of the plasma, leads to strong ionization and most electron losses on the low-density side, while the high-density side experiences weak ionization and minimal electron losses. The underlying mechanism triggering this spontaneous asymmetry is the differential influence of the magnetic field on low-energy (local) and high-energy (relatively nonlocal) electrons. Under conditions of low pressure and an appropriate magnetic field, this disparity in electron kinetic behavior leads to a spontaneous amplification of the asymmetry induced by random fluctuations until a steady state is reached, culminating in an spontaneous asymmetric effect.
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