Laser applications in GaN growth and processing

GaN has a wide application prospect in optoelectronics, semiconductor lighting and other fields because of its superior physical and electrical attributes. The in-depth research of the preparation and processing technology of GaN is particularly important. However, traditional GaN processing methods have limitations in processing, such as high processing difficulty and limited processing accuracy. Laser processing is a high-precision, non-contact, non-thermal carrier damage processing method that is widely employed for the growth and processing of GaN. Progress in GaN laser processing over the last few years is reviewed in this paper,focusing on laser etching of GaN and laser growth of GaN, including laser epitaxial growth technology, laser pulsed deposition technology and laser stripping transfer technology. Finally, the future development direction and challenges of laser growing and processing of GaN are prospected. Laser growth and processing techniques for GaN are expected to expand the range of applications for GaN devices.