材料科学
功率半导体器件
兴奋剂
光电子学
工程物理
二极管
氮化镓
功率(物理)
接口(物质)
宽禁带半导体
压电
半导体器件
晶体管
电子工程
电气工程
半导体
纳米技术
可靠性(半导体)
氮化物
砷化镓
能量转换
电力
计算机科学
调制(音乐)
压力(语言学)
功率MOSFET
电流(流体)
场效应晶体管
高电子迁移率晶体管
作者
Xiaojie Ren,Jinfeng Gao,Shihang Liu,Lin Li,Zhenghai Xie,Shuangzan Lu,Bo Zhao,Hanxiang Jia
出处
期刊:Journal of vacuum science & technology
[American Institute of Physics]
日期:2026-02-11
卷期号:44 (2)
摘要
This review focuses on gallium nitride (GaN) semiconductor materials, systematically discussing the latest research progress in doping modulation, interface engineering, and their applications in power devices. First, the article analyzes the mechanisms through which donor-type (e.g., Si) and acceptor-type (e.g., Mg) doping influence the electrical properties and piezoelectric characteristics of GaN, summarizing the regulatory effects of doping strategies on carrier concentration, mobility, and material stability. Second, it highlights the interfacial behavior and the formation principles of two-dimensional electron gas in AlGaN/GaN heterostructures, reviewing the contributions of interface passivation, interlayer optimization, and stress management to enhancing device dynamic characteristics and reliability. Finally, the review provides an in-depth analysis of the current applications of GaN-based high-electron-mobility transistors and power diodes in fields such as high-efficiency power conversion and high-frequency power switching, while also envisioning their future prospects in next-generation energy Internet and electric driving. This paper aims to offer a systematic reference for the material design and performance optimization of GaN-based power devices.
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