A new method of determining the equivalent circuit parameters of piezoelectric resonators and analysis of the piezoelectric loading effect

An inductive method of piezoelectric resonance detection is applied to the determination of equivalent circuit parameters of piezoelectric resonators. Using this method one can measure the resonance frequency and mechanical Q-factor of a resonator directly as well as their dependences on the electrical impedance which is connected to the resonator. From the equivalent circuit analysis the changes in resonance frequency and Q-factor due to the piezoelectric loading effects are determined. Measurements on two typical commercial piezoelectric resonators, an AT-cut quartz crystal and a PZT ceramic resonator, are in good agreement with the analysis.< >