铌酸锂
材料科学
蚀刻(微加工)
光电子学
联轴节(管道)
薄膜
干法蚀刻
锂(药物)
纳米技术
复合材料
内分泌学
图层(电子)
医学
作者
Tom Vandekerckhove,Ruben Van Assche,Ivo Tanghe,Margot Niels,Stijn Poelman,Tom Vanackere,Maximilien Billet,Stéphane Clemmen,Bart Kuyken
标识
DOI:10.1364/cleo_si.2024.sth3f.6
摘要
Efficient low-loss coupling to micro-transfer-printed lithium niobate remains a challenge. We developed a highly-selective lithium niobate etch that enables selective etching of tapered coupling structures into the lithium niobate thin film after micro-transfer printing.
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