Design and research on a laminated floating valve piezoelectric pump

To enhance the output capability of a piezoelectric pump, a multi-chamber stack-type piezoelectric pump based on floating valves was designed. Compared to the single-row series pump, the volume of this piezoelectric pump is reduced by 25%. With the use of floating valves, the pump responds more quickly and is less prone to fatigue failure. The output tests of the pump show that in the 60 – 180 Hz range, the peak output flow of the pump is 254 mL/min when the piezoelectric vibrators are synchronized in pairs and then driven asynchronously. At 190 – 280 Hz, the output extreme value of the pump is 317.2 mL/min when the 5th and 6th vibrators are synchronized and the other vibrators are driven asynchronously. Compared with the asynchronous drive, the maximum flow increase is 122%. At 290 – 400 Hz, the peak flow rate of the pump is 369.4 mL/min using asynchronous drive. At 60 – 400 Hz, the output pressure of the pump is the largest when driven asynchronously, reaching 115.4 kPa.