飞秒
纳米光刻
激光器
平版印刷术
3D打印
聚合
材料科学
制作
光子学
纳米制造
纳米尺度
纳米技术
连续波
光学
纳米压印光刻
倍半硅氧烷氢
纳米光子学
抛光
实现(概率)
纳米结构
光电子学
图像分辨率
光子晶体
光刻
计量学
光掩模
吞吐量
吸收(声学)
倍半硅氧烷
衍射
同轴
小型化
分辨率(逻辑)
三维光学数据存储
灰度
全息术
表面微加工
作者
Chenliang Ding,Jisen Wen,Chun Cao,Liang Xu,Jianyong Wang,Zhenyao Yang,Dazhao Zhu,Shih‐Chi Chen,Hongguang Cui,Cuifang Kuang
标识
DOI:10.1002/lpor.202501471
摘要
Abstract The realization of free‐form silica glass nanostructures with sub‐200 nm resolution represents a critical capability for advanced photonics and precision optics. Current femtosecond laser‐based approaches remain constrained by high costs, low throughput, and restricted fabrication areas. A novel nanoscale additive manufacturing technique employing continuous‐wave laser excitation is presented in a thermally curable polyhedral oligomeric silsesquioxane (POSS) photoresin, subsequently convertible to fused silica at 650 °C. The system utilizes synchronized coaxial laser beams to implement two distinct photochemical mechanisms: a two‐color two‐step absorption process for spatial confinement and optical force‐guided polymerization (OFGP) for subdiffraction pattern refinement. This synergistic approach overcomes spatial resolution limitations imposed by the photopolymer's memory effect, achieving an exceptional feature size of 102 nm, surpassing the optical diffraction limit. Experimental validation demonstrates successful fabrication of high‐fidelity curved surface architectures and programmable grayscale lithography with extended voxel modulation range. This dual‐laser nanofabrication platform establishes a new paradigm for glass‐based micro‐optics production, combining nanoscale precision with industrial‐scale throughput capabilities.
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