Influence of Multiple Piezoelectric Effects on Static Performance of Piezoelectric Sensors

Through composing a piezoelectric group consisting of two xy cutting-type quartz wafers transformed by d11,the influence of multiple piezoelectric effects on piezoelectric quartz sensors is studied.The influence of the static sensitivity of piezoelectric sensors is obtained by means of the method that a capacitor is paralleled with the sensor to eliminate the multiple piezoelectric effects.The experimental result shows that sensor's static sensitivity increases from 4.00 pC/N to 4.07 pC/N under 0.1 μF parallel capacitor,improving sensitivity by 1.75%.Further analysis indicates that the multiple piezoelectric effects have an influence on the piezoelectric coefficient that makes the sensitivity alter.Meanwhile,the influence on the elastic coefficient and the stiffness and the natural frequency of sensors is investigated after sensitivity is improved.The study of multiple piezoelectric effects provides a new method for the improvement of performance of piezoelectric sensors.