P‐161: Full‐in‐situ Imaging and Laser Processing System Supporting Detection and Removal of Defective Micro‐LED Dies During Mass Transfer

Micro‐LEDs have been hailed as the next‐generation display technology, with mass transfer being the key to achieving mass production of Micro‐LED displays. During the mass transfer process, it is crucial to identify and remove defective dies in order to ensure high yield and optimal display performance. In this paper, a novel in‐situ observation, imaging, and laser processing system is proposed, enabling online, in‐situ, and zero‐misalignment removal of faulty dies during the mass transfer process. This system holds great promise for significantly improving the efficiency of mass transfer and further driving the realization of mass production for Micro‐LED displays.