椭圆偏振法
材料科学
石墨烯
薄脆饼
硅
波长
光学
分析化学(期刊)
光电子学
薄膜
纳米技术
化学
物理
色谱法
作者
JW Jan-Willem Weber,V. E. Calado,van de Mcm Richard Sanden
摘要
A mechanically exfoliated graphene flake (∼150×380 μm2) on a silicon wafer with 98 nm silicon dioxide on top was scanned with a spectroscopic ellipsometer with a focused spot (∼100×55 μm2) at an angle of 55°. The spectroscopic ellipsometric data were analyzed with an optical model in which the optical constants were parameterized by B-splines. This parameterization is the key for the simultaneous accurate determination of the optical constants in the wavelength range 210–1000 nm and the thickness of graphene, which was found to be 3.4 Å.
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