Development of microstructure during the fabrication of Si3N4 by nitridation and pressureless sintering of Si:Si3N4 compacts

材料科学 烧结 微观结构 氮化硅 复合材料 冶金 氮化物 无压烧结 制作 陶瓷 渗氮 多孔性
作者
Lena K. L. Falk,R. Pompe,G. L. Dunlop
出处
期刊:Journal of Materials Science [Springer Science+Business Media]
卷期号:20 (10): 3545-3556 被引量:30
标识
DOI:10.1007/bf01113761
摘要

The technique for the fabrication of Si3N4 which was investigated involves the nitridation of Si:Si3N4 powder compacts containing additions of sintering aids (e.g. Y2O3 and Al2O3) followed by pressureless sintering. The development of microstructure during fabrication by this method has been followed by X-ray diffraction and analytical electron microscopy. As well as being important for the sintering process, it was found that the sintering aids promote nitridation through reaction with the surface silica on the powder particles. During nitridation extremely fine grained Si3N4 forms at silicon powder particle surfaces and at tunnel walls extending into the interior of these powder particles. Secondary crystalline phases which form during nitridation are eliminated from the microstructure during sintering. Theα- toΒ-Si3N4 phase transformation is completed early in the sintering process, but despite this the fully sintered product contains fineΒ-Si3N4 grains. TheΒ grains are surrounded by a thin intergranular amorphous film.

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