Characterization and Performance of LiFePO[sub 4] Thin-Film Cathodes Prepared with Radio-Frequency Magnetron-Sputter Deposition

films with a thickness of were deposited on a stainless steel substrate by radio-frequency magnetron sputtering of a /carbon composite target. Raman spectra revealed the presence of carbon in the film, which increased the electronic conductivity of the film relative to reports of the carbon-free material. X-ray diffraction revealed that the films were well crystallized, free of second phases, and may have a texture with a (011) orientation. The plus carbon film showed a good capacity and rate capability at 25° and when cycled as the cathode of a lithium battery, although the film was still inferior to the carbon-coated powder electrodes with particle size.