Angular distribution of cluster atoms due to cluster impact
作者
T. Muramoto,K. Yorizane,Y. Yamamura
出处
期刊:International Conference on Ion Implantation Technology日期:2002-11-28卷期号:2: 799-802
标识
DOI:10.1109/iit.1998.813788
摘要
The high-density effect on the angular distribution of penetrating cluster atoms due to cluster impacts on solid surfaces has been studied by molecular dynamics simulations. MD simulations are performed for (Cu)/sub 201//spl rarr/Pt[111] and (Pt)/sub 201//spl rarr/Cu[111] where the cluster energies are changed from 5 eV to 50 keV per atom. It is found that the high-density formation is strongly dependent on the cluster energy and the mass ratio between a cluster atom and target atom and that the angular distributions of cluster atom are enhanced near /spl theta/=90/spl deg/ for 5 eV/atom Cu cluster.