Research Progress in Machining Technology of Nanohole Arrays

Abstract： Nanohole arrays have important applications in the fields of biological detection， sensors, light-emitting devices， optical modulation and new energy sources.The basic principles, research status, processing efficiency, accuracy，quality and application range of several mainstream nanohole arrays processing technologies are reviewed, and the advantages and limitations of these processing methods are compared.Finally, the current challenges and future development directions of nanohole arrays processing technology are pointed out in order to provide new processing strategies toward the high efficiency, high precision, high quality and low cost manufacturing of large-area nanohole arrays. Key words：nanohole arrays；anodic oxidation