P‐14.14: Study on the effect of ITO surface modification on the lifetime of Micro OLED

Lifetime is one of the most important indicators of Micro OLED. By comparing the effect of Inductively Coupled Plasma（ICP） and Microwave Induced Plasma (MIP) on ITO surface modification, it is found that the energy level barrier and the interface defect state are the key factors affecting the Micro OLED lifetime. Compared with MIP, ICP with shorter plasma diffusion path can effectively improve these two key factors. ITO work function has changed from 4.49eV to 5.10eV and the roughness has changed from 0.952nm to 0.654nm. Thus solving the problem of rapid current decay in the lifetime test of Micro OLED. The results show the Micro OLED lifetime is increased from 50 hours to 120 hours under 95% luminance condition (@T95).