氯硅烷
原位
蚀刻(微加工)
材料科学
复合材料
硅
化学
光电子学
图层(电子)
有机化学
作者
Xudong Wang,Qian Fang,Mian Li,Zhifang Chai,Qing Huang
出处
期刊:Cornell University - arXiv
日期:2025-09-14
标识
DOI:10.48550/arxiv.2509.11380
摘要
Silicon-based MAX phases are a promising class of layered ceramics with superior thermal and chemical stability. However, their synthesis remains challenging due to inherent thermodynamic instability at high temperatures. Herein, we develop a general top-down strategy to synthesize a broad family of Si-substituted MAX phases (M = Ti, V, Nb, Ta, Cr; X = C, N) by reacting Al-based MAX precursors with SiCl4 vapor. This approach not only circumvents traditional high-temperature limitations but also enables precise A-site defect engineering, resulting in phases with controlled vacancy concentrations (e.g., Nb2Si3/4C and Nb2Si1/2C). Furthermore, we introduce a redox potential-based model that rationalizes the reaction pathway. Using Tin+1AlXn etched with SiCl4 as an example, the process simultaneously forms Cl-terminated MXene (Mn+1XnCl2) and amorphous nano-Si, enabling the one-step synthesis of Si-coated MXene composites. This methodology provides new avenues for designing advanced MAX phases and MXene-based hybrids with tailored functionalities for applications in energy storage and catalysis.
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