材料科学
锑化镓
腐蚀坑密度
基质(水族馆)
薄脆饼
半最大全宽
Crystal(编程语言)
光电子学
位错
单晶
衍射
傅里叶变换红外光谱
光学
结晶学
化学
蚀刻(微加工)
纳米技术
图层(电子)
超晶格
复合材料
物理
地质学
海洋学
程序设计语言
计算机科学
作者
Bing Yan,Weihua Liu,Zhijie Yu,Wenhui Yuan,Chang Yeon Yu,Xiaoxing Zhang,Li Huang
标识
DOI:10.1016/j.jcrysgro.2022.126988
摘要
Gallium antimonide (GaSb) is considered an ideal substrate for heterostructure growth. A significant property that inhibits the widespread application of infrared plane-array detector growth on GaSb is the crystal quality of the starting substrate. Herein, we report the growth of single-crystal GaSb by a temperature dynamic compensation vertical Bridgman (TDC-VB) method. This approach offers a low temperature gradient and a stable solid–liquid interface position in the furnace during the growth process. Two inch diameter twin-free GaSb single crystals with (1 0 0) orientation have been reproducibly obtained using the TDC-VB method. The crystalline character of the obtained GaSb has been examined by optical microscopy (OM), high-resolution X-ray diffraction (HRXRD), X-ray tomography (XRT), and Fourier-transform infrared (FTIR) spectroscopy. The etch pit dislocation density (EPD) of the GaSb polished wafers (1 0 0) was 6–72 cm−2, and the full-width at half-maximum (FWHM) of the Bragg diffraction peak was 15.4″. A uniform XRT image was obtained, and ca. 50 % of the GaSb wafers, which were produced by one crystal, showed transmittance > 20 % at 10 µm, indicating the formation of high-quality GaSb crystals. This work provides useful guidelines for the formation of high-quality GaSb crystals with significant promise for substrate applications.
科研通智能强力驱动
Strongly Powered by AbleSci AI