Homogeneity estimation morphometric model for particle distribution on example of SiC deposited on multilayer structure Fe/NiP

The theoretical justification of the distribution for particles/defects homogeneity estimation criterion \nwas done. The mathematical model was created on this basis and its object-oriented implementation \nwas realized. It is shown that the use of object-oriented programming allows getting a sufficient \nclearness and simplicity of an object’s general mathematical model, displaying in it as the \nobject properties so and methods by which the model can operate. Adequacy of the proposed model \nand research method was verified experimentally on samples of silicon carbide SiC deposited on \nthe multilayer structure of Fe/NiP.