材料科学
硅
多晶硅
自由载流子吸收
非晶硅
吸收(声学)
折射率
微晶
无定形固体
图层(电子)
光电子学
椭圆偏振法
兴奋剂
电流密度
晶体硅
纳米晶硅
分析化学(期刊)
光学
薄膜
结晶学
纳米技术
复合材料
化学
薄膜晶体管
物理
冶金
色谱法
量子力学
作者
Sina Reiter,Nico Koper,Rolf Reineke‐Koch,Yevgeniya Larionova,M. Turcu,Jan Krügener,Dominic Tetzlaff,Tobias Wietler,Uwe Höhne,J.-D. Kähler,Rolf Brendel,Robby Peibst
标识
DOI:10.1016/j.egypro.2016.07.057
摘要
We investigate the optical properties of n- and p-type polycrystalline silicon (poly-Si) layers. We determine the optical constants n and k of the complex refractive index of polycrystalline silicon by using variable-angle spectroscopic ellipsometry. Moreover, we investigate the effect of different doping levels in the poly-Si on free carrier absorption (FCA). Thereby, we demonstrate that the FCA in poly-Si can be described by a model developed for crystalline silicon (c-Si) at a first approximation. The optical properties of hydrogenated amorphous silicon layers (a-Si:H) are also investigated as a reference. With ray tracing simulations the absorption losses of poly-Si and of the a-Si:H layers are quantified with respect to the film thickness. Based on this approach we find that the short-circuit current density losses due to parasitic absorption of poly-Si layers are significantly lower when compared to a-Si:H layers of the same thickness. For example the short-circuit current density loss due to a 20 nm thick p-type poly-Si layer is around 1.1 mA/cm2, whereas a 20 nm thick p-type a-Si:H layer leads to a loss of around 3.5 mA/cm2.
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