谐振器
材料科学
光电子学
氮化硅
自由光谱范围
光学滤波器
氮化物
热稳定性
光子学
光学环形谐振器
热的
硅
光子集成电路
光学
电子工程
物理
工程类
纳米技术
气象学
量子力学
图层(电子)
作者
Reja Amatya,Charles W. Holzwarth,Henry I. Smith,Rajeev J. Ram
标识
DOI:10.1109/ps.2007.4300788
摘要
Thermal tuning for high-index-contrast silicon nitride second-order ring filter with low tuning power of 52 muW/GHz is analyzed. Efficient tuning of 4.5 GHz/K is demonstrated for these filters. Precise centre wavelength stability of approximately 100 MHz is obtained with temperature feedback controller. Their compact size, large free spectral range, low tuning power and low thermal crosstalk between the filters make these resonators attractive for photonic integration.
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