Application and Development of Femtosecond Laser Micromachining

Researchers focus on the femtosecond laser micromachining with three-dimensional ultra-precision microstructures due to ultra-short pulse,super peak power and high focus ability of the femtosecond,which makes the femtosecond laser micromachining technology to develop rapidly.Firstly,the interaction mechanisms between the femtosecond laser pulse transparent and non-transparent materials were introduced.Next,the ultra-precision micromachining of the fiber-optic sensor,fiber-optic communication,optical waveguide,coupler and metals with femtosecond was discussed in detail.Finally,we highlight the opportunities and the key problems of the femtosecond micromachining.