<title>Comparison of ANOVA and Latin square measurement system analysis techniques</title>

Measurement system analysis is essential for determining the quality of data used for process control. Analysis of variation, or ANOVA, is a commonly used technique for measurement system analysis. Recently, the Advanced Metrology Advisory Group at SEMATECH has proposed using the Latin Square technique for determining the reproducibility and repeatability of a CD SEM. Advantages and disadvantages of the two techniques will be discussed.