Conjuncted Pyro‐Piezoelectric Effect for Self‐Powered Simultaneous Temperature and Pressure Sensing

Ferroelectric materials use both the pyroelectric effect and piezoelectric effect for energy conversion. A ferroelectric BaTiO3 -based pyro-piezoelectric sensor system is demonstrated to detect temperature and pressure simultaneously. The voltage signal of the device is found to enhance with increasing temperature difference with a sensitivity of about 0.048 V °C-1 and with applied pressure with a sensitivity of about 0.044 V kPa-1 . Moreover, no interference appears in the output voltage signals when piezoelectricity and pyroelectricity are conjuncted in the device. A novel 4 × 4 array sensor system is developed to sense real-time temperature and pressure variations induced by a finger. This system has potential applications in machine intelligence and man-machine interaction.