Research on Simulation and Optimization of Micro-Heat Plate Structure of MEMS Gas Sensor

In this paper, the overall structure of the MEMS (micro electromechanical system) gas sensor suspended film micro-hot plate is optimized and improved by simulation software. Firstly, an unsupported cantilever beam structure is designed for the cantilevered film micro-heat plate. The design not only reduces the thermal stress of the micro-heat plate, but also reduces the heat loss caused by heat conduction. The result is that the power consumption of the sensor is also effectively reduced. Simulation results show that the maximum temperature near the test electrode is stable at 367.4°C, the thermal stress is 2.38 MPa, and the average power consumption is 8.9mW. Secondly, the manufacturing cost and process complexity of MEMS micro-hot plate gas sensors are greatly reduced by adopting the coplanar distribution of heating and test electrodes. Finally, the way to implement multi-channel gas detection is proposed based on the new micro-heat plate structure.