Gamma-radiation hardness and long-term stability of ALD-Al2O3 surface passivated Si

钝化 材料科学 退火(玻璃) 辐照 分析化学(期刊) 载流子寿命 辐射 光电子学 复合材料 纳米技术 化学 光学 图层(电子) 物理 色谱法 核物理学
作者
Michael N. Getz,Marco Povoli,O. Koybasi,T. Slavíček,E. V. Monakhov
出处
期刊:Journal of Applied Physics [American Institute of Physics]
卷期号:133 (15)
标识
DOI:10.1063/5.0143013
摘要

Al2O3 has emerged as the surface passivation material of choice for p-type silicon in photovoltaics and has also become a candidate for passivating Si-based radiation sensors. However, the surface passivation of Al2O3 has been shown to degrade when exposed to gamma-radiation, making it of interest to determine methods of depositing Al2O3 that minimize the radiation-induced degradation on the surface passivation. In this study, we investigate the long-term stability and gamma-radiation hardness of Al2O3 prepared using the TMA+H2O+O3 precursor combination and how the pretreatment, the deposition temperature, and the film thickness affect the density of interface states, Dit, and fixed oxide charge, Qfix, before and after gamma-irradiation. We find that the surface saturation current density, J0s, of silicon passivated by Al2O3 increases after annealing but stabilizes over time depending on the Al2O3 thickness. Samples with thicknesses of <20 nm stabilize within hours, while those with >60 nm stabilize over days. J0s stabilizes at lower values with increased Al2O3 thickness. After exposure to 1 Mrad gamma-radiation, the samples still exhibit low Dit and high Qfix, with the best performing sample having a Dit of 1.5 × 1010 eV−1 cm−2 and a Qfix of −3.1 × 1012 cm−2. The deposition temperature appears to indirectly affect radiation hardness, owing to its impact on the hydrogen concentration in the film and at the Si–SiOx–Al2O3 interface. Lifetime measurements after irradiation indicate that Al2O3 still passivates the surface effectively. The carrier lifetime and Qfix can largely be recovered by annealing samples in O2 at 435 °C.
最长约 10秒,即可获得该文献文件

科研通智能强力驱动
Strongly Powered by AbleSci AI
更新
大幅提高文件上传限制,最高150M (2024-4-1)

科研通是完全免费的文献互助平台,具备全网最快的应助速度,最高的求助完成率。 对每一个文献求助,科研通都将尽心尽力,给求助人一个满意的交代。
实时播报
2秒前
张张完成签到,获得积分20
3秒前
3秒前
123发布了新的文献求助10
4秒前
5秒前
香蕉觅云应助科研通管家采纳,获得10
5秒前
CipherSage应助科研通管家采纳,获得10
5秒前
桐桐应助科研通管家采纳,获得10
5秒前
上官若男应助科研通管家采纳,获得10
5秒前
H123应助科研通管家采纳,获得20
6秒前
研友_VZG7GZ应助科研通管家采纳,获得10
6秒前
NexusExplorer应助科研通管家采纳,获得10
6秒前
sci发布了新的文献求助30
6秒前
Joyce完成签到,获得积分20
7秒前
7秒前
莫华龙发布了新的文献求助10
7秒前
JamesPei应助不安的金连采纳,获得10
9秒前
9秒前
10秒前
传统的纸飞机完成签到 ,获得积分10
11秒前
科研通AI2S应助时间9采纳,获得10
12秒前
YYJ发布了新的文献求助10
13秒前
sci完成签到,获得积分10
15秒前
baolong发布了新的文献求助10
16秒前
17秒前
Mike001发布了新的文献求助10
20秒前
21秒前
Yuri完成签到,获得积分10
21秒前
一叶扁舟完成签到,获得积分10
21秒前
Mike001发布了新的文献求助10
22秒前
Mike001发布了新的文献求助10
23秒前
赘婿应助十三采纳,获得10
24秒前
Mike001发布了新的文献求助10
24秒前
25秒前
25秒前
Mike001发布了新的文献求助10
26秒前
可耐的寒松完成签到,获得积分10
26秒前
Mike001发布了新的文献求助10
27秒前
27秒前
科里斯皮尔应助YYJ采纳,获得10
27秒前
高分求助中
Teaching Social and Emotional Learning in Physical Education 900
Gymnastik für die Jugend 600
Chinese-English Translation Lexicon Version 3.0 500
Electronic Structure Calculations and Structure-Property Relationships on Aromatic Nitro Compounds 500
マンネンタケ科植物由来メロテルペノイド類の網羅的全合成/Collective Synthesis of Meroterpenoids Derived from Ganoderma Family 500
[Lambert-Eaton syndrome without calcium channel autoantibodies] 440
Plesiosaur extinction cycles; events that mark the beginning, middle and end of the Cretaceous 400
热门求助领域 (近24小时)
化学 材料科学 医学 生物 有机化学 工程类 生物化学 纳米技术 物理 内科学 计算机科学 化学工程 复合材料 遗传学 基因 物理化学 催化作用 电极 光电子学 量子力学
热门帖子
关注 科研通微信公众号,转发送积分 2385403
求助须知:如何正确求助?哪些是违规求助? 2092008
关于积分的说明 5262248
捐赠科研通 1819092
什么是DOI,文献DOI怎么找? 907219
版权声明 559114
科研通“疑难数据库(出版商)”最低求助积分说明 484620